Flexible Microsystems

At present, production processes for the manufacturing of flexible Microsystems (FLEMS) are established in the HSG-IMIT’s cleanroom laboratory. The new techniques for processing and joining of flexible materials such as polyimide, epoxy-based resin (SU-8), and parylene are added to the existing silicon micromachining technology.

By using these cost-efficient materials – especially as substrates for micro-structured systems – products for extremely price-conscious markets can be developed and produced at the HSG-IMIT. Also, by taking advantage of the mechanical flexibility of these materials, the level of integration of new micro systems can be clearly increased and their field of application is broadened.