Using bulk silicon micromachining the HSG-IMIT institute manufactures components such as sensors and fluidic elements in its own cleanroom facilities. Structures are defined by selectively etching the bulk material of silicon wafers. Experience in the process technology of this highly specialized field and the degree of precision which can be reached in micromachining lead to fast and reliable results in the development and production of MEMS.


Your Contact:
Dipl.-Phys. Peter Nommensen
+49 7721 943 - 225
+49 7721 943 - 210

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