Microvalves and micropumps

Microvalves and micropumps are considered to belong to the main building-blocks in microfluidics. For more than 15 years, HSG-IMIT has been active in the development of application-specific microvalve and micropump types. Beside traditional valve concepts, we pursue non-conventional valve mechanisms, e.g. on the basis of electroactive polymers (EAP).

Peristaltic micropump PMP-NC²:

• Durable + disposable (modular concept)
• Flow range 0-80 µL/min
• Normally-closed and backpressure independent

Multistable flow controller CapFlow:

• Durable + disposable (modular concept)
• Controlled flow range 0-100 µL/min
• Energy consumption only during flow regulation

Completed developments:

• Electrostatic 2/2 or 3/2 way pneumatic microvalve
  Device size 15x10x16 mm³, weight 5 g, response time < 1 ms,
  energy consumption < 10 mW
  
  
• Piezoelectric microvalve for liquids
  Device size 6x14x3 mm³, normally-closed up to 5 bar,
  flow-through > 4.5 µL/min