Differential pressure sensors

To detect especially smallest pressure differences with high precision, we develop differential pressure sensors using thermal flow sensors. The sensors contain a narrow flow channel in which, depending on the pressure difference to be measured, a flow rate is induced. The resulting flow velocity, which is proportional to the pressure difference, is precisely measured with a thermal flow sensor.

Typical characteristics:

• Measurement range:                   
  gases:            50 Pa – 1000 Pa (FullScale)
  liquids:            5 Pa – 300 Pa (FullScale)
• Accuracy:                         +/- 2 % of MW, +/- 0,2% FS
• Temperature dependency:  0,03 % per K (can be compensated)
• Position dependency:         < 0,5 %

The sensors can be customised to meet application specific requirements.