Flow sensors

The basic component of our thermal flow sensor is a microtechnological silicon chip comprising a very thin membrane made of silicon nitride with typical dimensions of 300 x 600 µm². On the membrane there are temperature sensors (thermocouples) and a heating element. During operation heat is generated by the heating element and released to the medium. The temperature sensors located on both sides of the heating element detect the resulting temperature distribution with high temporal resolution. This distribution changes when gases or liquids flow over the membrane. Thus, velocity and direction of the flow can be determined highly dynamic.

With this technology highly sensitive and inexpensive thermal flow sensors can be produced. We have all necessary competences and the required infrastructure available to develop customized flow sensor solutions fast and cost-efficient:

  • Layout, technology development and fabrication of sensor chips
  • Design and prototyping of sensor housings
  • Assembly and packaging technology
  • Hard- and software development for electronic control and signal processing
  • Measurement technology
  • Series production of sensor chips in our own cleanroom facility
  • Transfer of assembly and packaging processes to specialised companies
Your Contact:
Dipl.-Ing. Matthias Ashauer
+49 7721 943 - 229
+49 7721 943 - 210
matthias.ashauer@hsg-imit.de
Customised flow sensor solution